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Deep Reactive Ion Etching - an overview | ScienceDirect Topics
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trench etching
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Three step deep reactive ion etch for high density trench etching
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Comparison of the Bosch and a Cryogenically Cooled Deep Silicon Etch Processes
High aspect ratio via etching conditions for deep trench of silicon - ScienceDirect
ULTRA-HIGH ASPECT RATIO TRENCHES IN SINGLE CRYSTAL SILICON WITH EPITAXIAL GAP TUNING E. J. Ng*, C.-F. Chiang, Y. Yang, V. A. Hon
