Reactive Ion Etching (RIE)
High aspect ratio via etching conditions for deep trench of silicon - ScienceDirect
Plasma Etch Processes for SiC and GaN-on-Si Power Devices | SPTS
Shallow trench isolation - Wikipedia
Micromachines | Free Full-Text | Towards the Fabrication of High-Aspect-Ratio Silicon Gratings by Deep Reactive Ion Etching
Micromachines | Free Full-Text | Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD
Uniform Vertical Trench Etching on Silicon with High Aspect Ratio by Metal-Assisted Chemical Etching Using Nanoporous Catalysts | ACS Applied Materials & Interfaces
Dry Etching vs Wet Etching: Everything You Need To Know
Dry etching of Silicon is not just trench making.
Micro-trench free 4H-SiC etching with improved SiC/SiO2 selectivity using inductively coupled SF6/O2/Ar plasma
Morphology improvement of SiC trench by inductively coupled plasma etching using Ni/Al2O3 bilayer mask - ScienceDirect
30µm isolation trench etch | Download Scientific Diagram
GaN Deep Trench Etch｜Samco Inc.
Plasma etching of the trench pattern with high aspect ratio mask under ion tilting - ScienceDirect
High aspect ratio via etching conditions for deep trench of silicon - ScienceDirect
Effect of U-shape trench etching process on electrical properties of GaN vertical trench metal-oxide-semiconductor field-effect transistor
Uniform Vertical Trench Etching on Silicon with High Aspect Ratio by Metal-Assisted Chemical Etching Using Nanoporous Catalysts | ACS Applied Materials & Interfaces
Wet etching of deep trenches on silicon with three-dimensional (3D) controllability | Semantic Scholar
GaN Trench etching | Vacuum Magazine
SPM Fluorine Etching
Trench Etch Profile on MESA
Topography Simulation of Trench Etch Using Monte Carlo Plasma Etch Model with Polymer Re-deposition - Silvaco
Etch Overview
